Microfabricated hat

Author: Albert Folch (then postdoc at the Massachussets Institute of Technology with Prof. Martin Schmidt's group in the EECS Dept.).

 

For details, see A. Folch, M.S. Wrighton, and M.A. Schmidt, "Microfabrication of ultra-sharp Si tips on Si3N4 cantilevers for atomic force microscopy", Journal of Microelectromechanical Systems 6, 303-306 (1997).

Done