M-PLANE (10-10) SAPPHIRE WAFERS

www.cryscor.com/products/m-plane-10-10-sapphire-wafers.html

 

Due to its application prospects in solar-blind ultraviolet detection, MgZnO alloy semiconductor films with suitable band gaps have attracted more and more attention. A series of MgxZn1-xO thin films with different compositions were prepared on M plane sapphire wafers by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD).

 

CRYSCORE provides M plane (10-10) sapphire wafers with excellent surface quality. The roughness on the epi-polished side is lower than 0.5 nm.

 

Specifications of M-Plane (10-10) Sapphire Wafers

Item2-inch M-plane(10-10) 430μm Sapphire Wafers

Crystal Materials99,999%, High Purity, Monocrystalline Al2O3

GradePrime, Epi-Ready

Surface OrientationM-plane(11-10)

Diameter50.8 mm +/- 0.1 mm

Thickness430 μm +/- 25 μm

Primary Flat OrientationC-plane(0001) +/- 0.2°

Primary Flat Length16.0 mm +/- 1.0 mm

Single Side Polished

(SSP)Front SurfaceEpi-polished, Ra < 0.5 nm (by AFM)

Back SurfaceFine ground, Ra = 0.8 μm to 1.2 μm

Double Side Polished

(DSP)Front SurfaceEpi-polished, Ra < 0.5 nm (by AFM)

Back SurfaceEpi-polished, Ra < 0.5 nm (by AFM)

TTV< 10 μm

BOW< 10 μm

WARP< 10 μm

Cleaning / PackagingClass 100 cleanroom cleaning and vacuum packaging,

25 pieces in one cassette packaging or single piece packaging.

Note: Custom sapphire wafers with any orientation and any thickness can be provided.

Done